The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

Jun. 04, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Atsushi Kandori, Ebina, JP;

Makoto Takagi, Kawasaki, JP;

Masao Majima, Isehara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); B06B 1/02 (2006.01); B81C 1/00 (2006.01); G01N 29/24 (2006.01); G01D 5/24 (2006.01);
U.S. Cl.
CPC ...
G01R 27/2605 (2013.01); B06B 1/0292 (2013.01); B81C 1/00246 (2013.01); G01D 5/24 (2013.01); G01N 29/2406 (2013.01); G01N 29/2412 (2013.01); G01R 27/26 (2013.01);
Abstract

A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.


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