The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Jul. 24, 2012
Hak Wee Tang, Singapore, SG;
Xulei Yang, Singapore, SG;
Zin Oo Thant, Singapore, SG;
Ruini Cao, Singapore, SG;
Hak Wee Tang, Singapore, SG;
Xulei Yang, Singapore, SG;
Zin Oo Thant, Singapore, SG;
Ruini Cao, Singapore, SG;
GENERIC POWER PTE LTD, , SG;
Abstract
A method and apparatus for determining coplanarity of three-dimensional features on a substrate comprises a support for an object to be inspected in an object plane, a light source for illuminating the object, a first image capturing device having a first sensor and a first tiltable lens, a second image capturing device having a second sensor and a second tiltable lens, and an image processor to determine the coplanarity. Each tiltable lens is movable from a first variable angle to a second variable angle, with respect to its sensor, so that the respective lens plane and its sensor plane substantially intersect at the object plane in accordance with the Scheimpflug principle and the respective image is in focus across the whole field of view and of uniform light intensity.