The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

Nov. 18, 2014
Applicant:

Toyo Gosei Co., Ltd., Inzai-shi, JP;

Inventors:

Satoshi Enomoto, Inzai, JP;

Yusuke Suga, Inzai, JP;

Assignee:

Toyo Gosei CO., LTD, Ichikawa-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/004 (2006.01); C07C 43/215 (2006.01); C07C 69/54 (2006.01); C07D 317/22 (2006.01);
U.S. Cl.
CPC ...
C07C 43/215 (2013.01); C07C 69/54 (2013.01); C07D 317/22 (2013.01); G03F 7/0045 (2013.01); G03F 7/0397 (2013.01);
Abstract

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed. Also described is a method for manufacturing a device, the method including applying a liquid containing a composition to a member such that a coating film including the composition is formed on the member; and exposing the coating film to at least one of a first electromagnetic ray and a first particle ray such that a first portion of the coating film is exposed to the at least one of the first electromagnetic ray and the first particle ray while a second portion of the coating film is not exposed to the at least one of the first electromagnetic ray and the first particle ray.


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