The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

May. 19, 2015
Applicant:

Draka Comteq B.v., Amsterdam, NL;

Inventors:

Igor Milicevic, Amsterdam, NL;

Mattheus Jacobus Nicolaas Van Stralen, Amsterdam, NL;

Johannes Antoon Hartsuiker, Amsterdam, NL;

Gertjan Krabshuis, Amsterdam, NL;

Assignee:

Draka Comteq B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03B 37/018 (2006.01); C23C 16/04 (2006.01); C23C 16/40 (2006.01); C23C 16/511 (2006.01);
U.S. Cl.
CPC ...
C03B 37/0183 (2013.01); C03B 37/018 (2013.01); C23C 16/045 (2013.01); C23C 16/401 (2013.01); C23C 16/511 (2013.01); C03B 2201/12 (2013.01); C03B 2201/31 (2013.01);
Abstract

A method for carrying out a plasma deposition process including the steps of providing a substrate tube, supplying dopant-containing glass-forming gases to the substrate including a main gas flow and one or more secondary gas flows, inducing a plasma in the substrate tube, moving a reaction zone back and forth in strokes between a reversal point near the supply side and a reversal point near the discharge side, and interrupting the secondary gas flow during a portion of each stroke, each interruption having a start point and an end point within the same stroke.


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