The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Jul. 05, 2012
Applicants:
Florian Thalmayr, Cambridge, MA (US);
Jan H. Kuypers, Cambridge, MA (US);
Andrew Sparks, Cambridge, MA (US);
Inventors:
Florian Thalmayr, Cambridge, MA (US);
Jan H. Kuypers, Cambridge, MA (US);
Andrew Sparks, Cambridge, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/05 (2006.01); H03H 3/04 (2006.01);
U.S. Cl.
CPC ...
H03H 9/059 (2013.01); H03H 3/04 (2013.01);
Abstract
Apparatus and methods for control of the second order temperature dependence of the frequency of a mechanical resonating structure are described. The second order temperature dependence of frequency of the mechanical resonating structure may be non-linear. Control may be provided by doping of a semiconductor layer of the mechanical resonating structure.