The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Apr. 22, 2014
Applicant:

Sicrystal Aktiengesellschaft, Nuremberg, DE;

Inventors:

Thomas Straubinger, Moehrendorf, DE;

Michael Vogel, Nuremberg, DE;

Andreas Wohlfart, Erlangen, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/02 (2006.01); H01L 29/16 (2006.01); C30B 29/36 (2006.01); H01L 29/04 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); C30B 23/02 (2013.01); C30B 29/36 (2013.01); H01L 29/04 (2013.01); H01L 29/0657 (2013.01); Y10T 428/219 (2015.01);
Abstract

A method is used for producing an SiC volume monocrystal by sublimation growth. During growth, by sublimation of a powdery SiC source material and by transport of the sublimated gaseous components into the crystal growth region, an SiC growth gas phase is produced there. The SiC volume monocrystal grows by deposition from the SiC growth gas phase on the SiC seed crystal. The SiC seed crystal is bent during a heating phase before such that an SiC crystal structure with a non-homogeneous course of lattice planes is adjusted, the lattice planes at each point have an angle of inclination relative to the direction of the center longitudinal axis and peripheral angles of inclination at a radial edge of the SiC seed crystal differ in terms of amount by at least 0.05° and at most by 0.2° from a central angle of inclination at the site of the center longitudinal axis.


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