The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Apr. 14, 2010
Applicants:

Aarnoud Laurens Roest, Geldrop, NL;

Linda Van Leuken-peters, Maarheeze, NL;

Inventors:

Aarnoud Laurens Roest, Geldrop, NL;

Linda Van Leuken-Peters, Maarheeze, NL;

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 49/02 (2006.01); H01L 27/01 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 28/55 (2013.01); H01L 27/016 (2013.01); H01L 28/20 (2013.01); H01L 28/65 (2013.01); H01L 27/0251 (2013.01); H01L 27/0688 (2013.01);
Abstract

The present invention relates to a method for fabricating an electronic component, comprising fabricating, on a substrate () at least one integrated MIM capacitor () having a top capacitor electrode () and a bottom capacitor electrode () at a smaller distance from the substrate than the top capacitor electrode; fabricating an electrically insulating first cover layer () on the top capacitor electrode, which first cover layer partly or fully covers the top capacitor electrode and is made of a lead-containing dielectric material; thinning the first cover layer; fabricating an electrically insulating second cover layer () on the first cover layer, which second cover layer partly or fully covers the first cover layer and has a dielectric permittivity smaller than that of the first cover layer; and fabricating an electrically conductive resistor layer () on the second cover layer, which resistor layer has a defined ohmic resistance.


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