The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Mar. 30, 2012
Applicants:
Friedhelm Finger, Juelich, DE;
Andreas Schmalen, Huertgenwald, DE;
Johannes Wolff, Langerwehe, DE;
Inventors:
Assignee:
Forschungszentrum Juelich GmbH, Juelich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/02 (2006.01); C30B 25/02 (2006.01); C23C 16/24 (2006.01); C23C 16/32 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0262 (2013.01); C23C 16/24 (2013.01); C23C 16/325 (2013.01); C23C 16/4488 (2013.01); C30B 25/02 (2013.01); H01L 21/02529 (2013.01); H01L 21/02532 (2013.01);
Abstract
A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber.