The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Jun. 10, 2016
Applicants:

SK Innovation Co., Ltd., Seoul, KR;

SK Global Chemical Co., Ltd., Seoul, KR;

Inventors:

Min Ho Jung, Daejeon, KR;

Jeong Eop Choi, Daejeon, KR;

Hye Ryoung Lee, Daejeon, KR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/02 (2006.01); C08G 8/02 (2006.01); C09D 161/16 (2006.01); H01L 21/027 (2006.01); G03F 7/11 (2006.01); C08K 5/3445 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02118 (2013.01); C08G 8/02 (2013.01); C09D 161/16 (2013.01); G03F 7/11 (2013.01); H01L 21/0274 (2013.01); H01L 21/02282 (2013.01); H01L 21/02345 (2013.01); C08G 2150/00 (2013.01); C08K 5/3445 (2013.01);
Abstract

Provided are a polymer for an underlayer film, used in semiconductor and display manufacturing processes, an underlayer film composition for semiconductor and display manufacturing processes, containing the same, and a method for forming an underlayer film for semiconductor and display manufacturing processes using the underlayer film composition. The polymer according to the present invention is a polymer including a repeating unit represented by the following Chemical Formula 1: in Chemical Formula 1, Ar, Rto R, L, and R' and R″ are the same as those in the detailed description of the present invention.


Find Patent Forward Citations

Loading…