The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Sep. 04, 2012
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Anartz Unamuno, Dresden, DE;
Richard L. Knipe, McKinney, TX (US);
Vikram Joshi, Mountain View, CA (US);
Roberto Gaddi, S-Hertogenbosch, NL;
Toshiyuki Nagata, Los Gatos, CA (US);
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Anartz Unamuno, Dresden, DE;
Richard L. Knipe, McKinney, TX (US);
Vikram Joshi, Mountain View, CA (US);
Roberto Gaddi, S-Hertogenbosch, NL;
Toshiyuki Nagata, Los Gatos, CA (US);
CAVENDISH KINETICS, INC., San Jose, CA (US);
Abstract
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.