The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
May. 08, 2013
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Tapani Antila, VTT, FI;
Jussi Mäkynen, VTT, FI;
Christer Holmlund, VTT, FI;
Jarkko Antila, VTT, FI;
Jyrki Ollila, Oulu, FI;
Heikki Saari, VTT, FI;
TEKNLOGIAN TUTKIMUSKESKUS VTT OY, Espoo, FI;
Abstract
The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure () is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.