The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Aug. 26, 2013
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Daniel G. Smith, Tucson, AZ (US);
W. Thomas Novak, Redwood City, CA (US);
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/00 (2006.01); G01S 7/497 (2006.01); G01S 7/481 (2006.01);
U.S. Cl.
CPC ...
G01J 1/00 (2013.01); G01S 7/481 (2013.01); G01S 7/497 (2013.01);
Abstract
Boresight and other pointing errors are detected based on a monitor beam formed by diverting a portion of a probe beam. The monitor beam is directed to a position sensitive photodetector, and the optical power received at the position sensitive photodetector is used to estimate or correct such pointing errors.