Method of and apparatus for ascertaining the fine position value of a movable body

Abstract

A position sensor for ascertaining the fine position value z of a movable body includes an exciter unit moving therewith and a stationary sensor unit () which simultaneously delivers a plurality of output signals jointly describing the fine position value. In a calibration mode there is established a defined relationship between the exciter unit and a calibration unit () such that groups of amplitude values can be taken off from said output signals and groups of average values are formed therefrom, which are fed to the calibration unit () which converts them into reference values using the calibration fine position values μ(z) and stores same with the associated fine position as an associated values multiplet in a comparative value memory (). In each measuring mode groups of amplitude are taken off from the output signals from which groups of measuring values are produced by averaging and are fed to a computing unit (), which forms differences of cross products from the reference values of varying groups of reference values and the current measuring value group and causes said differences to go towards zero to ascertain the current fine position value.