The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9586286 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 07, 2017

Filed:

Sep. 25, 2014
Applicant:

Lextar Electronics Corporation, Hsinchu, TW;

Inventors:

Shih-Hsien Huang, Tainan, TW;

Shih-Hao Wang, Tainan, TW;

Po-Yuan Huang, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/36 (2014.01); B23K 26/352 (2014.01); B23K 26/40 (2014.01); H01L 51/56 (2006.01); B23K 26/067 (2006.01); G02B 27/10 (2006.01); G02B 27/30 (2006.01); G02B 19/00 (2006.01); G02B 5/30 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0656 (2013.01); B23K 26/066 (2015.10); B23K 26/0648 (2013.01); B23K 26/0676 (2013.01); B23K 26/362 (2013.01); B23K 26/352 (2015.10); B23K 26/40 (2013.01); G02B 5/3083 (2013.01); G02B 19/0014 (2013.01); G02B 19/0047 (2013.01); G02B 27/1093 (2013.01); G02B 27/30 (2013.01); H01L 51/56 (2013.01);
Abstract

The invention provides an apparatus for fabricating a periodic micro-pattern by laser beams. The apparatus includes an ultrafast laser light source configured to generate an output laser beam. A diffraction optical element is configured to divide the output laser beam into a plurality of diffractive laser beams. A confocal system is configured to focus the plurality of diffractive laser beams on a focal point, so that the plurality of diffractive laser beams produces an interference light beam with interference phenomena. The interference light beam ablates a surface of an element to fabricate a periodic micro-pattern on the surface of the element. The confocal system includes a first lens, a second lens and a light shielding mask. The plurality of diffractive laser beams passes through the first lens, the light shielding mask and the second lens in sequence.


Find Patent Forward Citations

Huang, Shih-Hsien. (2017). Apparatus and method for fabricating periodic micro-pattern by laser beams (U.S. Patent No. 9586286). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9586286

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