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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9586226 B1

PDFFull Text
Date of Patent:
Mar. 07, 2017

Filed:

Apr. 27, 2015

Gas cushion apparatus and techniques for substrate coating

Applicant:

Kateeva, Inc., Menlo Park, CA (US);

Inventors:

Alexander Sou-Kang Ko, Santa Clara, CA (US);

Justin Mauck, Belmont, CA (US);

Eliyahu Vronsky, Los Altos, CA (US);

Conor F. Madigan, San Francisco, CA (US);

Eugene Rabinovich, Fremont, CA (US);

Nahid Harjee, Charlotte, NC (US);

Christopher Buchner, Sunnyvale, CA (US);

Gregory Lewis, Mountainview, CA (US);

Assignee:

Kateeva, Inc., Newark, CA (US);

Attorney:
Primary Examiner:

Yewebdar Tadesse

Int. Cl.
CPC ...
B05C 13/00 (2006.01); B05C 5/00 (2006.01); B05B 15/06 (2006.01); B05D 3/06 (2006.01); B05D 3/02 (2006.01); H01L 51/00 (2006.01); B41J 3/407 (2006.01); B05C 15/00 (2006.01); C23C 14/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 23/532 (2006.01); H05K 3/00 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
B05B 15/06 (2013.01); B05C 13/00 (2013.01); B05C 15/00 (2013.01); B05D 3/0254 (2013.01); B05D 3/065 (2013.01); B41J 3/407 (2013.01); C23C 14/00 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67161 (2013.01); H01L 21/67196 (2013.01); H01L 21/67207 (2013.01); H01L 21/67248 (2013.01); H01L 21/67739 (2013.01); H01L 21/67784 (2013.01); H01L 21/67787 (2013.01); H01L 21/6838 (2013.01); H01L 51/00 (2013.01); H01L 21/4867 (2013.01); H01L 23/5328 (2013.01); H01L 2924/0002 (2013.01); H05K 3/0091 (2013.01);
Abstract

A coating can be provided on a substrate. Fabrication of the coating can include forming a solid layer in a specified region of the substrate while supporting the substrate in a coating system using a gas cushion. For example, a liquid coating can be printed over the specified region while the substrate is supported by the gas cushion. The substrate can be held for a specified duration after the printing the patterned liquid. The substrate can be conveyed to a treatment zone while supported using the gas cushion. The liquid coating can be treated to provide the solid layer including continuing to support the substrate using the gas cushion.

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