The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2017

Filed:

Nov. 12, 2013
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Ordos, Inner Mongolia, CN;

Inventor:

Zuqiang Wang, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/02 (2006.01); H05B 3/00 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H05B 3/0047 (2013.01); H01L 21/324 (2013.01); H01L 21/6776 (2013.01); H01L 21/67115 (2013.01);
Abstract

An annealing apparatus includes: a temperature-gradient preheating unit, configured for performing a gradient-preheating process for a substrate that is to be annealed by using a gradient temperature; a high temperature heating unit, configured for performing a high temperature heating process for the preheated substrate; and a shifting device, configured for transporting the substrate from the temperature-gradient preheating unit to the high temperature heating unit when and/or after the substrate is subjected to the gradient-preheating process. The annealing apparatus adopts a gradient heating method to perform a preheating treatment for the substrate, so the annealing efficiency is increased. An annealing process that uses the annealing apparatus is further provided.


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