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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9584090 B1

PDFFull Text
Date of Patent:
Feb. 28, 2017

Filed:

Mar. 04, 2016

Rf impedance matching network

Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventor:

Anton Mavretic, Natick, MA (US);

Assignee:

Reno Technologies, Inc.;

Attorney:

The Belles Group, P.C.

Primary Examiner:

Stephen E Jones

Int. Cl.
CPC ...
H03H 7/40 (2006.01); H03H 7/38 (2006.01); G01R 27/26 (2006.01); G01R 27/28 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H03H 7/38 (2013.01); G01R 27/2605 (2013.01); G01R 27/28 (2013.01); H01J 37/32183 (2013.01); H01L 21/02274 (2013.01); H01L 21/28556 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01); H01L 21/31138 (2013.01); H01L 21/32136 (2013.01); H01L 21/67115 (2013.01); H03H 7/40 (2013.01);
Abstract

An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and, the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.

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