The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Oct. 03, 2012
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventors:
Taku Kikuchi, Nagaokakyo, JP;
Hideaki Takahashi, Nagaokakyo, JP;
Assignee:
Murata Manufacturing Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/02 (2006.01); H03H 9/02 (2006.01); C23C 14/34 (2006.01); H03H 3/10 (2006.01); H03H 3/00 (2006.01); H03H 9/00 (2006.01); H03H 9/145 (2006.01); C23C 14/00 (2006.01); H03H 3/04 (2006.01); H03H 9/72 (2006.01);
U.S. Cl.
CPC ...
H03H 3/10 (2013.01); C23C 14/0036 (2013.01); C23C 14/0042 (2013.01); C23C 14/0073 (2013.01); C23C 14/34 (2013.01); C23C 14/3407 (2013.01); C23C 14/3421 (2013.01); C23C 14/3428 (2013.01); C23C 14/3435 (2013.01); H03H 3/00 (2013.01); H03H 3/02 (2013.01); H03H 9/00 (2013.01); H03H 9/02 (2013.01); H03H 9/02228 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02582 (2013.01); H03H 9/02834 (2013.01); H03H 9/14538 (2013.01); H03H 9/725 (2013.01); H03H 2003/0428 (2013.01); Y10T 29/42 (2015.01);
Abstract
A method for manufacturing an acoustic wave device with an excellent frequency-temperature profile is performed such that the acoustic wave device produced includes a piezoelectric substrate, an IDT electrode located on the piezoelectric substrate, and a dielectric film mainly including Si and O and arranged on the piezoelectric substrate to cover the IDT electrode. The dielectric film is formed by sputtering in a sputtering gas containing HO.