The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Oct. 16, 2014
Applicant:
SK Hynix Inc., Gyeonggi-do, KR;
Inventor:
Hyung Keun Kim, Gyeonggi-do, KR;
Assignee:
SK Hynix Inc., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); H01L 27/22 (2006.01); H01L 27/24 (2006.01); H01L 43/08 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1675 (2013.01); H01L 27/222 (2013.01); H01L 27/2463 (2013.01); H01L 43/08 (2013.01); H01L 43/12 (2013.01); H01L 45/04 (2013.01); H01L 45/06 (2013.01); H01L 45/1233 (2013.01); H01L 45/14 (2013.01); H01L 45/141 (2013.01); H01L 45/147 (2013.01);
Abstract
A method for fabricating a semiconductor apparatus includes providing a semiconductor substrate, stacking a conductive layer, a variable resistance layer, and a sacrificial layer on the semiconductor substrate, etching the conductive layer, the variable resistance layer, and the sacrificial layer to form a pillar structure including a lower electrode, a variable resistor device, and a sacrificial layer pattern, removing the sacrificial layer pattern, and forming an upper electrode over the variable resistor device in a hole which is formed by removing the sacrificial layer pattern.