The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2017

Filed:

Feb. 17, 2015
Applicant:

Sandisk 3d Llc, Milpitas, CA (US);

Inventors:

Yung-Tin Chen, Santa Clara, CA (US);

Guangle Zhou, Fremont, CA (US);

Christopher Petti, Mountain View, CA (US);

Assignee:

SANDISK TECHNOLOGIES LLC, Plano, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 29/08 (2006.01); H01L 21/8234 (2006.01); H01L 21/84 (2006.01); H01L 29/739 (2006.01); H01L 29/786 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01); H01L 21/823487 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/0847 (2013.01); H01L 29/42356 (2013.01); H01L 29/42384 (2013.01); H01L 29/66666 (2013.01); H01L 29/7391 (2013.01); H01L 29/78642 (2013.01);
Abstract

A first patterned stack and a second patterned stack are formed over a substrate, each of which includes a bottom semiconductor layer, a bottom dielectric spacer layer, a conductive material layer, and a top dielectric spacer layer. Gate dielectrics and vertical semiconductor portions are sequentially formed on each patterned stack. Vertical semiconductor portions are removed from around the second patterned stack, while masked around the first patterned stack. Electrical dopants are introduced to top regions and bottom regions of the remaining vertical semiconductor portions to form a vertical switching device that includes the first patterned stack, while the second patterned stack functions as a horizontal interconnect structure. The vertical switching device can be a transistor or a gated diode.


Find Patent Forward Citations

Loading…