The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2017

Filed:

Dec. 15, 2015
Applicants:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Seoul National University R&db Foundation, Seoul, KR;

Inventors:

Min-Chul Sun, Seoul, KR;

Byung-Gook Park, Hwasung, KR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/072 (2012.01); H01L 29/423 (2006.01); H01L 29/06 (2006.01); H01L 27/088 (2006.01); H01L 29/772 (2006.01); H01L 21/8234 (2006.01); H01L 29/786 (2006.01); H01L 27/12 (2006.01); B82Y 99/00 (2011.01);
U.S. Cl.
CPC ...
H01L 29/42392 (2013.01); H01L 21/823412 (2013.01); H01L 27/088 (2013.01); H01L 27/1222 (2013.01); H01L 29/0673 (2013.01); H01L 29/772 (2013.01); H01L 29/78696 (2013.01); B82Y 99/00 (2013.01); Y10S 977/762 (2013.01); Y10S 977/938 (2013.01);
Abstract

A semiconductor device has gate-all-around devices formed in respective regions on a substrate. The gate-all-around devices have nanowires at different levels. The threshold voltage of a gate-all-around device in first region is based on a thickness of an active layer in an adjacent second region. The active layer in the second region may be at substantially a same level as the nanowire in the first region. Thus, the nanowire in the first region may have a thickness based on the thickness of the active layer in the second region, or the thicknesses may be different. When more than one active layer is included, nanowires in different ones of the regions may be disposed at different heights and/or may have different thicknesses.


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