The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Dec. 23, 2015
Shenzhen Royole Technologies Co. Ltd., Shenzhen, CN;
SHENZHEN ROYOLE TECHNOLOGIES CO., LTD., Shenzhen, CN;
Abstract
The present invention provides a method of manufacturing a thin film transistor pixel unit, comprising: forming a metal oxide layer, a gate insulating layer, a gate metal layer and an etching barrier layer on a substrate, wherein the metal oxide layer is in a thin film transistor region; through a same mask, etching a part of the etching barrier layer, the gate metal layer and the gate insulating layer on the substrate for forming a gate region, source and drain regions for forming contact vias, a gate interface region, and a storage capacitor region, respectively. Through additional steps including etching, metallizing, and filling, a source contact via is formed in the source region, a drain contact via is formed in the drain region, and a connecting contact via is formed in the gate interface region, respectively.