The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Feb. 12, 2014
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Shawn A. Adderly, Essex Junction, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Eric A. Joseph, White Plains, NY (US);
Anthony C. Speranza, Gilbert, SC (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/30 (2006.01); G01R 31/00 (2006.01); H01L 21/66 (2006.01); H01L 21/768 (2006.01); H01J 37/32 (2006.01); H05H 1/24 (2006.01); C23C 16/04 (2006.01); C23C 16/513 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); C23C 16/04 (2013.01); C23C 16/513 (2013.01); G01N 23/2252 (2013.01); H01J 37/32082 (2013.01); H01J 37/32366 (2013.01); H01J 37/32449 (2013.01); H01J 37/32568 (2013.01); H01L 21/76892 (2013.01); H01L 21/76894 (2013.01); H05H 1/2406 (2013.01); G01N 2223/6116 (2013.01); G01N 2223/645 (2013.01); H01J 2237/2817 (2013.01); H05H 2001/2431 (2013.01);
Abstract
An apparatus for and methods of repairing and manufacturing integrated circuits using the apparatus. The apparatus, comprising: a vacuum chamber containing: a movable stage configured to hold a substrate; an inspection and analysis probe; a heat source; a gas injector; and a gas manifold connecting multiple gas sources to the gas injector.