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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9583372 B1

PDFFull Text
Date of Patent:
Feb. 28, 2017

Filed:

Dec. 10, 2015

Structure for joining ceramic plate to metal cylindrical member

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Takashi Kataigi, Handa, JP;

Takashi Tanimura, Tokyo, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:

Burr & Brown, PLLC

Primary Examiner:

Kiley Stoner

Int. Cl.
CPC ...
B23K 31/02 (2006.01); H01L 21/683 (2006.01); B23K 1/19 (2006.01); C04B 37/02 (2006.01); H01L 21/687 (2006.01); B23K 1/00 (2006.01); B23K 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B23K 1/0008 (2013.01); B23K 1/19 (2013.01); B23K 3/00 (2013.01); C04B 37/02 (2013.01); H01L 21/68785 (2013.01); B23K 2203/18 (2013.01); B23K 2203/52 (2015.10);
Abstract

A member for semiconductor manufacturing device includes a susceptor which is a ceramic plate formed of AlN and a gas introduction pipe which is joined to the susceptor. An annular pipe joining bank is provided at a position of the susceptor facing a flange of the gas introduction pipe. In addition, a pipe brazed part is formed between the flange and the pipe joining bank. The flange has a width of 3 mm or more and a thickness of from 0.5 to 2 mm. It is preferable that the height of the pipe joining bank be 0.5 mm or more, the edge of the bank facing the outer edge of the flange. be chamfered as designated by C0.3 or more or rounded as designated by R0.3 or more.

Find Patent Forward Citations

Kataigi, Takashi. (2017). Structure for joining ceramic plate to metal cylindrical member (U.S. Patent No. 9583372). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9583372

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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