The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Apr. 08, 2014
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Suk Choi, Seongnam-si, KR;
Sung-Mo Gu, Daegu, KR;
Youngjin Noh, Namyangju-si, KR;
Youngwon Kim, Yongin-si, KR;
Changhyun Ryu, Cheonan-si, KR;
Chi Youn Chung, Seoul, KR;
Seunghee Lee, Jeonju-si, KR;
Young Eun Choi, Jeonju-si, KR;
SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY, Deonju-si, Jeonbuk, KR;
Abstract
An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.