The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2017

Filed:

Apr. 08, 2014
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Suk Choi, Seongnam-si, KR;

Sung-Mo Gu, Daegu, KR;

Youngjin Noh, Namyangju-si, KR;

Youngwon Kim, Yongin-si, KR;

Changhyun Ryu, Cheonan-si, KR;

Chi Youn Chung, Seoul, KR;

Seunghee Lee, Jeonju-si, KR;

Young Eun Choi, Jeonju-si, KR;

Assignees:

SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

INDUSTRIAL COOPERATION FOUNDATION CHONBUK NATIONAL UNIVERSITY, Deonju-si, Jeonbuk, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/13 (2006.01); G01N 21/88 (2006.01); G02F 1/1337 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G02F 1/1309 (2013.01); G01N 21/8806 (2013.01); G01N 2021/8848 (2013.01); G01N 2021/9513 (2013.01); G01N 2201/067 (2013.01); G02F 1/1303 (2013.01); G02F 2001/133773 (2013.01);
Abstract

An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.


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