Method for evaluating and improving pupil luminance distribution, illumination optical system and adjustment method thereof, exposure apparatus, exposure method, and device manufacturing method

Abstract

Improvement of pupil luminance distribution includes: a fifth process in which an index value obtained from the illumination pupil, using evaluation method of a first process to fourth process; a sixth process wherein a unit change amount of the index value in the discrete data acquired in the previous process is acquired for each unit pupil area; a seventh process wherein discrete data modulated by an improving technique using the unit change amount so that the index value nears a target index value is acquired; and an eighth process wherein an index value obtained corresponding to the modulated discrete data in the seventh process is acquired, using the evaluation method of the first process to the fourth process, and by repeatedly performing the sixth process to eighth process so an error of the index value obtained corresponding to the modulated discrete data falls within permissible range.