The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Dec. 28, 2015
Applicant:
Korea Advanced Institute of Science and Technology, Daejeon, KR;
Inventors:
Jhinhwan Lee, Daejeon, KR;
Donghyeon Son, Daejeon, KR;
Assignee:
Korea Advanced Institute of Science and Technology, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/24 (2010.01); G01Q 70/06 (2010.01); G01Q 60/38 (2010.01); G01Q 80/00 (2010.01);
U.S. Cl.
CPC ...
G01Q 70/06 (2013.01); G01Q 60/38 (2013.01); G01Q 80/00 (2013.01);
Abstract
Plural AFM probes with different resolutions are implemented on an apparatus for scanning a nearly free-standing nanometer-scale specimen. The apparatus identifies the location and the shape of the nano structure on a specimen piece using a high resolution AFM probe, and then measures a three-dimensional shape of the identified nano structure using an atomic resolution AFM probe.