The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
May. 30, 2013
Applicant:
Yokogawa Electric Corporation, Tokyo, JP;
Inventors:
Assignee:
YOKOGAWA ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 15/14 (2006.01); G01F 15/00 (2006.01); G01F 1/684 (2006.01);
U.S. Cl.
CPC ...
G01F 1/6845 (2013.01); G01F 1/6842 (2013.01); G01F 1/6847 (2013.01); G01F 15/00 (2013.01); G01F 15/14 (2013.01);
Abstract
A micro flow sensor includes: a flow path through which a fluid to be measured flows; a detection unit having a heater configured to heat the fluid to be measured in the flow path and temperature sensors configured to measure temperature of a fluid to be measured in the flow path; an arithmetic unit configured to measure a flow rate of the fluid to be measured flowing through the flow path based on the temperature of the fluid to be measured, measured by the temperature sensors; and a narrowed portion disposed on an upstream side of the detection unit in the flow path for narrowing the flow path.