The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Dec. 16, 2015
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); B81B 3/00 (2006.01); H04R 19/00 (2006.01); B81C 1/00 (2006.01); H04R 7/06 (2006.01);
U.S. Cl.
CPC ...
B81B 3/007 (2013.01); B81B 3/0018 (2013.01); B81B 3/0035 (2013.01); B81B 3/0051 (2013.01); B81C 1/00158 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); H04R 7/06 (2013.01); H04R 19/04 (2013.01);
Abstract
A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.