The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Jul. 24, 2013
Jason S. Smith, Oakwood Hills, IL (US);
Casey C. Clausen, Portland, OR (US);
James H. Kreisel, Winona, MN (US);
Thomas J. Restis, Buffalo Grove, IL (US);
Jason S. Smith, Oakwood Hills, IL (US);
Casey C. Clausen, Portland, OR (US);
James H. Kreisel, Winona, MN (US);
Thomas J. Restis, Buffalo Grove, IL (US);
DUREX INTERNATIONAL CORP., Cary, IL (US);
Abstract
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.