The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Jun. 23, 2015
Globalfoundries Inc., Grand Cayman, KY;
Vibhor Jain, Essex Junction, VT (US);
Qizhi Liu, Lexington, MA (US);
Ian A. McCallum-Cook, Burlington, VT (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
Electrical fuses and methods for forming an electrical fuse. A semiconductor substrate is implanted to define a modified region in the semiconductor substrate. Trenches that surround the modified region and that penetrate into the semiconductor substrate to a depth greater than a depth of the modified region are formed in the modified region so as to define a fuse link of the electrical fuse. The substrate is removed from beneath the fuse link with a selective etching process that removes the semiconductor substrate with a first etch rate that is higher than a second etch rate of the modified region.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile