The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Feb. 20, 2013
Osram Opto Semiconductors Gmbh, Regensburg, DE;
Thomas Bauer, Regensburg, DE;
OSRAM OPTO SEMICONDUCTORS GMBH, Regensburg, DE;
Abstract
A substrate carrier arrangement () for a coating system () is provided, comprising a carrier () which comprises at least one support region () having a support surface (), on which a substrate support () is arranged, and which support region comprises in the support surface () at least one first and one second gas inlet (), wherein the first gas inlet () is at a smaller distance from a center (M) of the support surface () than the second gas inlet () and wherein the first and second gas inlet () comprise mutually independent gas feeds () which are arranged to supply gases having mutually different thermal conductivities. A coating system comprising a substrate carrier arrangement and a method for performing a coating process are also provided.