The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Nov. 17, 2014
Applicant:
Nxp B.v., Eindhoven, NL;
Inventors:
Peter G. Steeneken, Valkenswaard, NL;
Klaus Reimann, Eindhoven, NL;
Assignee:
NXP B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 7/06 (2006.01); H01G 5/16 (2006.01); H03J 5/24 (2006.01); H01G 5/013 (2006.01); H01G 5/00 (2006.01);
U.S. Cl.
CPC ...
H01G 5/16 (2013.01); H01G 5/013 (2013.01); H01G 5/0136 (2013.01); H01G 7/06 (2013.01); H03J 5/248 (2013.01); H01G 2005/02 (2013.01);
Abstract
A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.