The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
May. 23, 2012
James Geza Deak, Zhangjiagang, CN;
Insik Jin, Zhangjiagang, CN;
Weifeng Shen, Zhangjiagang, CN;
Xiaofeng Lei, Zhangjiagang, CN;
Songsheng Xue, Zhangjiagang, CN;
James Geza Deak, Zhangjiagang, CN;
Insik Jin, Zhangjiagang, CN;
Weifeng Shen, Zhangjiagang, CN;
Xiaofeng Lei, Zhangjiagang, CN;
Songsheng Xue, Zhangjiagang, CN;
MultiDimension Technology Co., Ltd., Zhangjiagang, CN;
Abstract
The present invention discloses a design for a single-chip dual-axis magnetic field sensor, based on magnetic tunnel junction (MTJ) elements and permanent magnets integrated on a semiconductor substrate to produce two types of sensor bridges that detect orthogonal magnetic field components. The orthogonal magnetic field component detection capability results from the different types of sensor bridges that can be produced by varying the shape of the MTJ elements and the bias fields that can be created by permanent magnets. Because the permanent magnets can create orthogonal bias fields on the different sensor bridges, it is possible to use a single pinned layer to set direction for both sensor bridges. This is advantageous because it permits the two-axis sensor to be fabricated on a single semiconductor chip without the need for specialized processing technology such as local heating, or deposition of multiple magnetoresistive films with different pinned layers setting directions.