The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Oct. 17, 2013
Fuji Electric Co., Ltd., Kawasaki-shi, Kanagawa, JP;
The University of Tokyo, Bunkyo-ku, Tokyo, JP;
Naoki Takeda, Yokohama, JP;
Masaya Tabaru, Hino, JP;
Kazuhiro Koizumi, Sagamihara, JP;
Noritomo Hirayama, Hino, JP;
Nobuyuki Takegawa, Tokyo, JP;
Takuma Miyakawa, Tokyo, JP;
FUJI ELECTRIC CO., LTD, Kawasaki-Shi, Kanagawa, JP;
THE UNIVERSITY OF TOKYO, Tokyo, JP;
Abstract
A particle beam forming device for forming either a linear or conical particle beam from a particle source in which particles are dispersed in a gas, includes: a reduced-pressure vessel in which pressure is reduced; a particle beam generating unit, which has one end arranged outside of the reduced-pressure vessel and an other end arranged inside the reduced-pressure vessel, and which captures the particle source from outside the reduced-pressure vessel and introduces the particle beam into the reduced-pressure vessel; and a particle beam evaluating unit for evaluating a spatial distribution of the particle beam inside the reduced-pressure vessel.