The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Jan. 14, 2015
Nippon Mektron, Ltd., Tokyo, JP;
Masayuki Iwase, Tokyo, JP;
Keizo Toyama, Tokyo, JP;
Kazuyuki Ozaki, Tokyo, JP;
Hirokazu Ohdate, Tokyo, JP;
Taisuke Kimura, Tokyo, JP;
Ryoichi Toyoshima, Tokyo, JP;
NIPPON MEKTRON, LTD., Tokyo, JP;
Abstract
A pressure sensing element () includes a support substrate (); a sensor electrode () supported by the support substrate (); a pressure sensing film () functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (); and an insulating layer () which keeps the sensor electrode () and the pressure sensing film () apart from each other by a predetermined distance A, and has formed therein an opening () in which the sensor electrode () is exposed to the pressure sensing film (), the insulating layer () having an aperture wall () which partitions the opening (), and an aperture end (top aperture end ()) faced to the pressure sensing film (), and the insulating layer () being increased in height, measured from the support substrate (), continuously towards the opening ().