The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Mar. 27, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Jeffrey J. Grimes, South Burlington, VT (US);

Kevin C. Remillard, Fairfax, VT (US);

Matthew F. Stanton, Salt Point, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/08 (2006.01); B05D 3/12 (2006.01); G01B 5/25 (2006.01); B05D 1/00 (2006.01); G01B 5/28 (2006.01); H01L 21/67 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
G01B 5/25 (2013.01); B05D 1/005 (2013.01); G01B 5/28 (2013.01); H01L 21/6715 (2013.01); B05C 11/08 (2013.01); G03F 7/162 (2013.01);
Abstract

A gauge and method of use. The gauge includes a body configured to removeably mount to substrate chuck of a spin apply coating tool, the body rotatable about an axis passing through a center of the chuck; an extendable arm having a first end mounted to the body, the extendable arm having a retracted position and a deployed position, a second end of the arm including an upper finger and a lower finger, the upper finger configured to be positioned above a rim of the coat apply bowl and the lower finger positioned below the rim of the coat apply bowl in the deployed position when the coat apply bowl is mounted in the spin apply tool; and wherein the gauge provides an error indication when the gauge is rotated about the axis and the coat apply bowl is not installed in the spin apply coating tool correctly.


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