The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Nov. 12, 2013
Applicant:

University of North Texas, Denton, TX (US);

Inventors:

Guido Fridolin Verbeck, IV, Plano, TX (US);

Stephen Davila, Odessa, TX (US);

Assignee:

University of North Texas, Denton, TX (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/22 (2006.01); B82B 3/00 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C23C 14/28 (2006.01); C23C 14/54 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01);
U.S. Cl.
CPC ...
C23C 14/221 (2013.01); B82B 3/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C23C 14/04 (2013.01); C23C 14/12 (2013.01); C23C 14/28 (2013.01); C23C 14/54 (2013.01); B81C 2201/112 (2013.01);
Abstract

A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.


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