The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Feb. 16, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Joy Cheng, San Jose, CA (US);

Anindarupa Chunder, San Jose, CA (US);

Daniel P. Sanders, San Jose, CA (US);

Melia Tjio, San Jose, CA (US);

Ankit Vora, San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09D 125/14 (2006.01); C09D 169/00 (2006.01); C08F 114/18 (2006.01); C08F 214/18 (2006.01); H01L 21/027 (2006.01); C08F 120/22 (2006.01); C08F 220/22 (2006.01); C08F 220/24 (2006.01);
U.S. Cl.
CPC ...
C09D 169/00 (2013.01); C08F 114/18 (2013.01); C08F 214/182 (2013.01); C08F 214/186 (2013.01); H01L 21/0271 (2013.01); C08F 120/22 (2013.01); C08F 220/22 (2013.01); C08F 220/24 (2013.01);
Abstract

A film layer comprising a high-chi (χ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.


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