The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Jun. 28, 2011
Donald J. Milligan, Corvallis, OR (US);
Rodney L. Alley, Albany, OR (US);
Peter G. Hartwell, Sunnyvale, CA (US);
Robert G. Walmsley, Palo Alto, CA (US);
Donald J. Milligan, Corvallis, OR (US);
Rodney L. Alley, Albany, OR (US);
Peter G. Hartwell, Sunnyvale, CA (US);
Robert G. Walmsley, Palo Alto, CA (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafercomprising a bond layer of a particular thicknesson a surface of a substrate materialremoving the bond layerin a first area--to expose the surface of the substrate materialapplying a mask to at least a portion of a remaining bond layer----and a portion of the exposed surface of the substrate material in the first area---to form a second area exposed on the surface of the substrate materialetching the second area to form a cavityin the substrate materialand the bond layerand forming by the etching, in the cavitya structure--for restricting out-of-plane travel, where the structure--has a particular height from a bottom of the cavitydetermined by the particular thickness of the bond layer