The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
May. 16, 2014
Applicant:
Nxp B.v., Eindhoven, NL;
Inventors:
Assignee:
NXP B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 21/84 (2006.01); H01L 29/73 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 29/861 (2006.01); H01L 29/40 (2006.01); H01L 21/8249 (2006.01); H01L 29/739 (2006.01); H01L 29/74 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0623 (2013.01); H01L 21/76221 (2013.01); H01L 21/76227 (2013.01); H01L 21/76281 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/0649 (2013.01); H01L 29/404 (2013.01); H01L 29/7302 (2013.01); H01L 29/78624 (2013.01); H01L 29/861 (2013.01); H01L 21/8249 (2013.01); H01L 29/402 (2013.01); H01L 29/7394 (2013.01); H01L 29/7436 (2013.01);
Abstract
A semiconductor die is disclosed comprising a lateral semiconductor device on an upper major surface of a substrate, the integrated circuit comprising a silicon layer over the substrate, a recess in the silicon layer, a layer of LOCOS silicon oxide within the recess and having a grown upper surface which is coplanar with the surface of an un-recessed portion of the silicon layer, wherein the silicon layer beneath the recess has a non-uniform lateral doping profile, and is comprised in a drift region of the lateral semiconductor device. A method of making such a die is also disclosed, as is an integrated circuit and a driver circuit.