The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Feb. 08, 2012
Ichiro Mitsuyoshi, Kyoto, JP;
Hideki Shibata, Kyoto, JP;
Tomoyasu Furuta, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A substrate treating apparatus includes a pod storage unitbetween a substrate treating unitand a pod storage and transport unit, with a transport robottransporting FOUPsbetween a load portand a rack array. A transport robottransports the FOUPsbetween the rack array, a rack arrayand a receiver. The transportation between the load portand rack arrayand the transportation between the rack array, rack arrayand receivercan be carried out substantially in parallel. As a result, the efficiency of transporting the FOUPscan be improved to improve throughput. Moreover, an increase in apparatus size can be inhibited since only the pod storage unitis disposed between the pod storage and transport unitand substrate treating unit. The capacity for storing the FOUPscan be increased to make effective use of the high throughput of the apparatus.