The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Sep. 05, 2014
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, Tokyo, JP;
Inventor:
Yumi Hayashi, Zama Kanagawa, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01);
Abstract
According to one embodiment, a MEMS device includes a variable capacitor including a lower electrode fixed to a substrate and a movable upper electrode provided above the lower electrode, a pressure-sensitive section covering the variable capacitor and connected to the upper electrode, configured to displace according to a pressure applied, and a protective structure provided on an outer side of the pressure-sensitive section.