The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Dec. 02, 2015
Applicants:
Seong-joon Cho, Osan-si, KR;
Hyun-su Cho, Suwon-si, KR;
Inventors:
Seong-Joon Cho, Osan-si, KR;
Hyun-Su Cho, Suwon-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); H01L 33/00 (2010.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 33/005 (2013.01);
Abstract
An embodiment includes an apparatus, comprising: a chamber; a main disk that is rotatably disposed in a chamber and configured to receive a substrate; a gas supply unit configured to supply a process gas to the chamber; a gas collector unit including a gas exhaust channel separate from the main disk and vertically lower than the main disk; and a skirt unit disposed on a peripheral portion of the main disk and configured to reduce turbulence of the process gas flowing to the gas collector unit.