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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9567665 B1

PDFFull Text
Date of Patent:
Feb. 14, 2017

Filed:

Feb. 02, 2011

Sputtering target for magnetic recording film, and process for producing same

Applicants:

Hideo Takami, Ibaraki, JP;

Atsushi Nara, Ibaraki, JP;

Shin-ichi Ogino, Ibaraki, JP;

Inventors:

Hideo Takami, Ibaraki, JP;

Atsushi Nara, Ibaraki, JP;

Shin-ichi Ogino, Ibaraki, JP;

Assignee:

JX Nippon Mining & Metals Corporation, Tokyo, JP;

Attorney:

Howson & Howson, LLP

Primary Examiner:

Jason M Berman

Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/14 (2006.01); C23C 14/08 (2006.01); H01J 37/34 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); G11B 5/851 (2006.01);
U.S. Cl.
CPC ...
C23C 14/14 (2013.01); C23C 14/0617 (2013.01); C23C 14/0688 (2013.01); C23C 14/083 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01J 37/3426 (2013.01);
Abstract

Provided is a sputtering target containing SiOfor a magnetic recording film, wherein a ratio of the peak intensity of cristobalites, which are crystallized SiO, to the background intensity (cristobalite peak intensity/background intensity) in an X-ray diffraction is 1.40 or less. The present invention aims to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, and shortening the burn-in time.

Find Patent Forward Citations

Takami, Hideo. (2017). Sputtering target for magnetic recording film, and process for producing same (U.S. Patent No. 9567665). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9567665

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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