The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Nov. 06, 2015
Applicant:
Superconductor Technologies, Inc., Santa Barbara, CA (US);
Inventors:
Ward Ruby, Palm City, FL (US);
Kurt Von Dessonneck, Auburn, CA (US);
Brian Moeckly, Santa Barbara, CA (US);
Assignee:
SUPERCONDUCTOR TECHNOLOGIES, INC., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0021 (2013.01); C23C 14/24 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/546 (2013.01); C23C 14/566 (2013.01);
Abstract
A reactor apparatus includes a first chamber coupled to a first source of vacuum, a monitor chamber isolated from the first chamber and coupled to a second source of vacuum, and at least one removable deposition monitor disposed in the monitor chamber.