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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9567467 B1

PDFFull Text
Date of Patent:
Feb. 14, 2017

Filed:

Dec. 02, 2014

Thermal spray coating, member for semiconductor manufacturing equipment, feedstock material for thermal spray, and method for producing thermal spray coating

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Yosuke Sato, Hashima-Gun, JP;

Katsuhiro Inoue, Tsushima, JP;

Yuji Katsuda, Tsushima, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:

Burr & Brown, PLLC

Primary Examiner:

Colin W Slifka

Int. Cl.
CPC ...
C08K 3/22 (2006.01); C08K 3/28 (2006.01); C09D 1/00 (2006.01); C04B 35/053 (2006.01); C04B 35/622 (2006.01); C04B 35/645 (2006.01); C23C 4/10 (2016.01);
U.S. Cl.
CPC ...
C09D 1/00 (2013.01); C04B 35/053 (2013.01); C04B 35/62222 (2013.01); C04B 35/645 (2013.01); C23C 4/10 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3865 (2013.01); C04B 2235/3869 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/76 (2013.01); C04B 2235/80 (2013.01);
Abstract

A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.

Find Patent Forward Citations

Sato, Yosuke. (2017). Thermal spray coating, member for semiconductor manufacturing equipment, feedstock material for thermal spray, and method for producing thermal spray coating (U.S. Patent No. 9567467). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9567467

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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