The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2017

Filed:

Apr. 08, 2016
Applicant:

SK Hynix Inc., Icheon-si, Gyeonggi-do, KR;

Inventors:

Hack Seob Shin, Icheon-si, KR;

Sang Hyuk Nam, Cheongju-si, KR;

Byung Soo Park, Suwon-si, KR;

Jong Ho Jung, Seoul, KR;

Assignee:

SK HYNIX INC., Icheon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 27/115 (2006.01); H01L 23/535 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/4846 (2013.01); H01L 21/76897 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/535 (2013.01);
Abstract

A semiconductor device may include a substrate, conductive patterns stacked to be spaced apart from each other on the substrate, contact plugs coming in contact with the respective conductive patterns, and first and second slit insulating layers of a first group penetrating the conductive patterns. The substrate may include a cell area and a contact area extending along a first direction from the cell area. The conductive patterns may be form a step structure. The first slit insulating layers of the first group may be opposite to each other in a second direction with any one of the contact plugs, interposed therebetween. The second slit insulating layers of the first group, which extend along the first direction in the contact area, may be opposite to each other in the second direction with the first slit insulating layers of the first group and the contact plugs, interposed therebetween.


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