The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2017

Filed:

Jul. 06, 2015
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Christoph Kadow, Neuried, DE;

Thorsten Meyer, Munich, DE;

Norbert Krischke, Munich, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H01L 29/73 (2006.01); H01L 29/732 (2006.01); H01L 29/40 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0623 (2013.01); H01L 29/0696 (2013.01); H01L 29/407 (2013.01); H01L 29/41708 (2013.01); H01L 29/42368 (2013.01); H01L 29/732 (2013.01); H01L 29/7302 (2013.01); H01L 29/7813 (2013.01); H01L 29/402 (2013.01); H01L 29/4238 (2013.01); H01L 29/66666 (2013.01); H01L 29/7825 (2013.01); H01L 29/7828 (2013.01);
Abstract

An integrated transistor structure includes an epitaxial layer on a semiconductor substrate, a power transistor formed in a first region of the epitaxial layer and having a drain region, a source region and a body region shorted to the source region, a bipolar transistor formed in a second region of the epitaxial layer spaced apart from the power transistor. A first trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the power transistor includes a gate electrode spaced apart from a channel region of the power transistor by an insulating material. A second trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor includes a trench electrode spaced apart from the epitaxial layer by an insulating material. The gate electrode, base and emitter of the bipolar transistor are connected to different contacts isolated from one another.


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