The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2017
Filed:
Apr. 07, 2014
Applicant:
Oerlikon Surface Solutions Ag, Trübbach, Trübbach, CH;
Inventor:
Joerg Kerschbaumer, Feldkirch, AT;
Assignee:
Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3435 (2013.01); C23C 14/3407 (2013.01); H01J 37/3438 (2013.01); H01J 37/3467 (2013.01); H01J 37/3497 (2013.01);
Abstract
A system that has a plate with a holder, in which the plate is centered in the holder both at room temperatures and at higher temperatures, independently of the thermal expansion of the plate and the holder, and in which the plate can freely expand in the holder at higher temperatures.